Publication:
Cleaning the high aspect ratio STI structures for advanced logic devices by implementation of a surface modification drying technique
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2107 since deposited on 2021-10-26
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Acq. date: 2026-07-17
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Statistics
Views
2107 since deposited on 2021-10-26
1last month
1last week
Acq. date: 2026-07-17
Citations