Authors

Sebaai, Farid; Vereecke, Guy; Xu, XiuMei; Baudot, Sylvain; Amemiya, Fumihiro; Komori, Kana; Holsteyns, Frank

Conference

Ultra Clean Processing of Semiconductor Surfaces XIV - UCPSS

Title

Cleaning the high aspect ratio STI structures for advanced logic devices by implementation of a surface modification drying technique

Publication type

Meeting abstract