Browsing by author "Gronbeck, D."
Now showing items 1-3 of 3
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Dependence of the minimal PVD Ta(N) sealing thickness on the porosity of Zirkon low-k films
Iacopi, Francesca; Zistl, C.; Jehoul, Christiane; Tokei, Zsolt; Le, Quoc Toan; Das, Arabinda; Sullivan, C.; Prokopowicz, G.; Gronbeck, D.; Gallagher, M.; Calvert, J.; Maex, Karen (2002) -
Properties of mesoporous low-k MSSQ based film prepared using macromolecular porogen
Baklanov, Mikhaïl; Jehoul, Christiane; Flannery, C. M.; Moguilnikov, Konstantin; Gore, R.; Gronbeck, D.; Prokopowicz, G.; Sullivan, C.; You, Y.; Pugliano, N.; Gallagher, M. (2002) -
Single damascene integration of porous zirkonTM version 1 low-k dielectric films
Malhouitre, Stéphane; Jehoul, Christiane; Van Aelst, Joke; Struyf, Herbert; Brongersma, Sywert; Carbonell, Laure; Vos, Ingrid; Beyer, Gerald; Van Hove, Marleen; Gronbeck, D.; Gallagher, M.; Calvert, J.; Maex, Karen (2003-11)