Publication:
Dependence of the minimal PVD Ta(N) sealing thickness on the porosity of Zirkon low-k films
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1927 since deposited on 2021-10-14
1last month
Acq. date: 2026-02-27
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Statistics
Views
1927 since deposited on 2021-10-14
1last month
Acq. date: 2026-02-27
Citations