Publication:
Dependence of the minimal PVD Ta(N) sealing thickness on the porosity of Zirkon low-k films
Date
Loading...
Journal
Abstract
Description
Metrics
Views
1924 since deposited on 2021-10-14
1last month
1last week
Acq. date: 2025-12-08
Citations
Metrics
Views
1924 since deposited on 2021-10-14
1last month
1last week
Acq. date: 2025-12-08
Citations