Browsing by author "Braithwaite, N. St. J."
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Ultra low-k etching by neutral beams produced from CF4/Ar and SF6/Ar ICP plasmas
Zotovich, Alexey; El Otell, Ziad; Sutton, Yvonne; Braithwaite, N. St. J.; de Marneffe, Jean-Francois; Baklanov, Mikhail (2016)