Browsing by author "Gitshin, O."
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Cryogenic etching of porous low-k dielectrics in CF3Br plasma
Rezvanov, Askar; Miakonkikh, A.; Vishnevskiy, A.; Gitshin, O.; Rudenko, K.; Baklanov, Mikhaïl (2016)
Now showing items 1-1 of 1