Cryogenic etching of porous low-k dielectrics in CF3Br plasma

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Authors
Rezvanov, Askar; Miakonkikh, A.; Vishnevskiy, A.; Gitshin, O.; Rudenko, K.; Baklanov, Mikhaïl
Conference
Materials for Advanced Metallization conference - MAM
Title
Cryogenic etching of porous low-k dielectrics in CF3Br plasma
Publication type
Oral presentation
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