Publication:
Cryogenic etching of porous low-k dielectrics in CF3Br plasma
Date
| dc.contributor.author | Rezvanov, Askar | |
| dc.contributor.author | Miakonkikh, A. | |
| dc.contributor.author | Vishnevskiy, A. | |
| dc.contributor.author | Gitshin, O. | |
| dc.contributor.author | Rudenko, K. | |
| dc.contributor.author | Baklanov, Mikhaïl | |
| dc.date.accessioned | 2021-10-23T14:10:52Z | |
| dc.date.available | 2021-10-23T14:10:52Z | |
| dc.date.issued | 2016 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/27210 | |
| dc.source.conference | Materials for Advanced Metallization conference - MAM | |
| dc.source.conferencedate | 20/03/2016 | |
| dc.source.conferencelocation | Brussels Belgium | |
| dc.title | Cryogenic etching of porous low-k dielectrics in CF3Br plasma | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
| Files | ||
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