Publication:

Cryogenic etching of porous low-k dielectrics in CF3Br plasma

Date

2016

Presentation

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Author(s)

Rezvanov, Askar

;

;

Vishnevskiy, A.

;

;

;

Baklanov, Mikhaïl

Statistics

1963 since deposited on 2021-10-23

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Acq. date: 2026-05-31