Publication:

Cryogenic etching of porous low-k dielectrics in CF3Br plasma

Date

2016
Presentation
Simple item page Full metadata Statistics
Loading...
Thumbnail Image

Author(s)

Rezvanov, Askar
;
Miakonkikh, A.
;
Vishnevskiy, A.
;
Gitshin, O.
;
Rudenko, K.
;
Baklanov, Mikhaïl

Journal

Abstract

Description

Statistics

Views

1960 since deposited on 2021-10-23
Acq. date: 2026-02-24

Citations

Statistics

Views

1960 since deposited on 2021-10-23
Acq. date: 2026-02-24

Citations