Browsing by author "Hai-Zhi, Song"

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Plasma immersion ion implantation for shallow junctions in silicon

Pinter, Istvan; Abdulhadi, A. H.; Makaro, Z.; Khanh, N. Q.; Adam, M.; Barsony, I.; Poortmans, Jef; Sivoththaman, Sivanarayanamoorthy; Hai-Zhi, Song; Adriaenssens, G. (1999)