Browsing by author "Boese, Markus"

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Liquid injection MOCVD of dysprosium scandate films. Deposition characteristics and high-k applications

Thomas, Reji; Ehrhart, Peter; Roeckerath, Martin; Van Elshocht, Sven; Rije, Eduard; Luysberg, Martina; Boese, Markus; Schubert, Jürgen; Caymax, Matty; Waser, Rainer (2007)