Browsing by author "Vishnevskiy, A."

Now showing items 1-1 of 1

Cryogenic etching of porous low-k dielectrics in CF3Br plasma

Rezvanov, Askar; Miakonkikh, A.; Vishnevskiy, A.; Gitshin, O.; Rudenko, K.; Baklanov, Mikhaïl (2016)