Browsing by author "Ferhat, Marhoun"

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Effect of processing parameters on self-assembly of cylindrical phase PS-b-PMMA BCPs on 300 mm Si wafers

Loucif Seiad, Mohamed; Singh, Arjun; MKuppuswamy, Vijaya Kumar; Ferhat, Marhoun; Gronheid, Roel (2014)
PMMA removal in diblock copolymer P(S-b-MMA) self-assembly process

Loucif Seiad, Mohamed; Gronheid, Roel; Singh, Arjun; MKuppuswamy, Vijaya Kumar; Cao, Yi; Ferhat, Marhoun (2014)