Browsing by author "Gale, G."
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Post salicidation clean: selective removal of un-reacted NiPt towards NiPtSi(Ge)
Xu, Kaidong; Lauwers, Anne; Vos, Rita; Archer, L.; Kraus, Harald; Demeurisse, Caroline; Mertens, Sofie; Mertens, Paul; Henry, Sally-Ann; Gale, G.; Kovacs, F; Dalmer, M.; Gaulhofer, E (2007)