Browsing by author "Billington, Hans"

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Area-Selective Atomic Layer Deposition of Ru Using Carbonyl-Based Precursor and Oxygen Co-Reactant: Understanding Defect Formation Mechanisms

Lodha, Jayant Kumar; Meersschaut, Johan; Pasquali, Mattia; Billington, Hans; De Gendt, Stefan; Armini, Silvia (2024)