Browsing by author "Porter, Stephen"
Now showing items 1-2 of 2
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Characterization of CF3I for low-k material etching
Samara, Vladimir; Porter, Stephen; de Marneffe, Jean-Francois; Baklanov, Mikhaïl (2013) -
Effect of 147 nm radiation on a 2.0 porous organo-Silicon glass
de Marneffe, Jean-Francois; Lukaszewicz, Mikolaj; Porter, Stephen; Zhang, Liping; Heyne, Markus; Baklanov, Mikhaïl (2013)