Characterization of CF3I for low-k material etching

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Authors
Samara, Vladimir; Porter, Stephen; de Marneffe, Jean-Francois; Baklanov, Mikhaïl
Conference
Plasma Etch and Strip in Microtechnology - PESM
Title
Characterization of CF3I for low-k material etching
Publication type
Meeting abstract
Embargo date
9999-12-31
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