Publication:

Characterization of CF3I for low-k material etching

Date

2013

Meeting abstract

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Files

26321.pdf 101.25 KB

Author(s)

Samara, Vladimir

;

Porter, Stephen

;

de Marneffe, Jean-Francois

;

Baklanov, Mikhaïl

Statistics

1921 since deposited on 2021-10-21

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Acq. date: 2026-05-20