Publication:

Characterization of CF3I for low-k material etching

Date

2013
Meeting abstract
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Author(s)

Samara, Vladimir
;
Porter, Stephen
;
de Marneffe, Jean-Francois  
;
Baklanov, Mikhaïl

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Abstract

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1919 since deposited on 2021-10-21
Acq. date: 2026-04-27

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1919 since deposited on 2021-10-21
Acq. date: 2026-04-27

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