Browsing by author "Endendijk, Wilfred"
Now showing items 1-1 of 1
-
Performance of FlexRay, a fully programmable illumination system for generation of freeform sources on high NA immersion systems
Mulder, Melchior; Engelen, Andre; Noordman, Oscar; Streutker, Gert; van Drieenhuizen, Bert; van Nuenen, Cas; Endendijk, Wilfred; Verbeeck, Jef; Bouman, Wim; Bouma, Anita; Kazinczi, Robert; Socha, Robert; Juergens, Dirk; Zimmermann, Joerg; Trauter, Bastian; Bekaert, Joost; Laenens, Bart; Corliss, Daniel; McIntyre, Greg (2010)