Browsing by author "Ramos-Martos, Juan"

Now showing items 1-1 of 1

SIGEM, low temperature deposition of poly-SiGe MEMs structures on standard CMOS circuits

Ramos-Martos, Juan; Ceballos-Caceres, Joaquin; Ragel-Morales, Antonio; Mora=-Gutierrez, Jose Miguel; Arias-Drake, Alberto; Lagos-Florido, Miguel-ANgel; Munoz-Hinojosa, Jose Maria; Mehta, Anshu; Verbist, Agnes; Du Bois, Bert; Kehr, Kersten; Leinenbach, Christina; Van Aerde, Steven; Spengler, Jorg; Witvrouw, Ann (2005)