Browsing by author "Risch, Lothar"
Now showing items 1-2 of 2
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Characterization of ultra-thin SOI transistors down to 20nm gate length regime with scanning spreading resistance microscopy (SSRM)
Hartwich, J.; Alvarez, David; Dreeskornfeld, L.; Specht, M.; Vandervorst, Wilfried; Risch, Lothar (2003) -
High resolution 2D scanning spreading resistance microscopy (SSRM) of thin film SOI MOSFETs with ultra short effective channel length
Hartwich, J.; Alvarez, David; Dreeskornfeld, L.; Hoffman, F.; Kretz, J.; Landgraf, E.; Luyken, R.J.; Rösner, W.; Schulz, T.; Specht, M.; Städele, M.; Vandervorst, Wilfried; Risch, Lothar (2003)