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Characterization of ultra-thin SOI transistors down to 20nm gate length regime with scanning spreading resistance microscopy (SSRM)
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1918 since deposited on 2021-10-15
1last month
Acq. date: 2026-04-06
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Statistics
Views
1918 since deposited on 2021-10-15
1last month
Acq. date: 2026-04-06
Citations