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Characterization of ultra-thin SOI transistors down to 20nm gate length regime with scanning spreading resistance microscopy (SSRM)
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Authors
Hartwich, J.
;
Alvarez, David
;
Dreeskornfeld, L.
;
Specht, M.
;
Vandervorst, Wilfried
;
Risch, Lothar
Conference
Proceedings 33rd European Solid-State Device Research Conference - ESSDERC
Title
Characterization of ultra-thin SOI transistors down to 20nm gate length regime with scanning spreading resistance microscopy (SSRM)
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Proceedings paper
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