Publication:
Characterization of ultra-thin SOI transistors down to 20nm gate length regime with scanning spreading resistance microscopy (SSRM)
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1917 since deposited on 2021-10-15
3last month
Acq. date: 2026-02-26
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Statistics
Views
1917 since deposited on 2021-10-15
3last month
Acq. date: 2026-02-26
Citations