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Characterization of ultra-thin SOI transistors down to 20nm gate length regime with scanning spreading resistance microscopy (SSRM)
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1912 since deposited on 2021-10-15
2last month
Acq. date: 2025-12-13
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1912 since deposited on 2021-10-15
2last month
Acq. date: 2025-12-13
Citations