Browsing by author "Ling, Zhi Ming"
Now showing items 1-4 of 4
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Effect of CMP slurry filtration on wafer defectivity
Devriendt, Katia; Meuris, Marc; Heylen, Nancy; Vrancken, Evi; Grillaert, Joost; Heyns, Marc; Ling, Zhi Ming (1998) -
Porous structures and short-wavelength photoluminescence of C+-implanted SiO2 films
Zhao, J.; Mao, D. S.; Ding, Xiaobin; Ling, Zhi Ming; Jiang, B. Y.; Yu, Y. H.; Yang, G. Q.; Liu, X. H. (1999) -
Relation between oxide-CMP induced defects and post-CMP cleaning strategies
Devriendt, Katia; Vrancken, Evi; Heylen, Nancy; Grillaert, Joost; Meuris, Marc; Heyns, Marc; Ling, Zhi Ming (1998) -
Relation between oxide-CMP induced defects and post-CMP cleaning strategies
Devriendt, Katia; Vrancken, Evi; Heylen, Nancy; Grillaert, Joost; Meuris, Marc; Heyns, Marc; Ling, Zhi Ming (1999)