Browsing by author "Vancoillie, Steven"

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Atomic layer deposition of ruthenium on titanium nitride surface: a density functional theory study

Phung, Quan; Vancoillie, Steven; Pourtois, Geoffrey; Swerts, Johan; Pierloot, Christine; Delabie, Annelies (2013)
Ruthenocene and cyclopentadienyl pyrrolyl ruthenium as precursors for ruthenium atomic layer deposition: a comparative study of dissociation enthalpies

Phung, Quan; Vancoillie, Steven; Delabie, Annelies; Pourtois, Geoffrey; Pierloot, Christine (2012)