Browsing by author "Streefkerk, B."

Now showing items 1-1 of 1

CD control comparison of step & repeat versus step & scan DUV lithography for sub-0.25 μm gate printing

Ronse, Kurt; Maenhoudt, Mireille; Marschner, Thomas; Van den hove, Luc; Streefkerk, B.; Finders, Jo; van Schoot, J.; Luehrmann, P.; Minvielle, A. (1998)