Browsing by author "Chiou, T.B."
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Experimental verification of a model based decomposition method for double dipole lithography
Eurlings, M.; Hsu, S.D.; Hendrickx, Eric; op 't Root, W.; Laidig, T.L.; Chiou, T.B.; Chen, A.; Chen, F.; Vandenberghe, Geert; Finders, J. (2004) -
The magnitude of potential exposure-tool-induced critical dimension and overlay errors in double dipole lithography for the 65-nm and 45-nm technology nodes
Chiou, T.B.; Chen, A.C.; Tseng, S.E.; Eurlings, M.; Hendrickx, Eric; Hsu, S. (2004)