Browsing by author "Banerjee, Souvik"
Now showing items 1-2 of 2
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Impact of CO2 cryogenic pre-treatment on ion impanted photresist wet cleaning
Malhouitre, Stephane; Vos, Rita; Banerjee, Souvik; Bearda, Twan; Mertens, Paul (2008) -
Stripping of ion implanted photoresist by Co2 cryogenic pre-treatment followed by wet cleaning
Malhouitre, Stephane; Vos, Rita; Banerjee, Souvik; Bearda, Twan; Mertens, Paul (2008)