Browsing by author "Lin, Chenxi"
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Feasibility study of grapho-epitaxy DSA for complementing EUV lithography beyond N10
Lin, Chenxi; Zou, Yi; Ambesi, Davide; Druzhinina, Tamara; Wuister, Sander; Karageorgos, Ioannis; Ryckaert, Julien; Raghavan, Praveen; Gronheid, Roel (2015)