Browsing by author "Bauer, Frank"
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Composition quantification of microelectronics multilayer thin films by EDX: toward small scale analysis
Conard, Thierry; Arstila, Kai; Hantschel, Thomas; Franquet, Alexis; Vandervorst, Wilfried; Vecchio, Emma; Bauer, Frank; Burgess, Simon (2009)