Browsing by author "Socha, B."

Now showing items 1-2 of 2

    • KrF lithography for 130nm 

      Finders, Jo; van Schoot, J.; Vanoppen, Peter; Dusa, M.; Socha, B.; Vandenberghe, Geert; Ronse, Kurt (2000)

    • Separable models for computational lithography 

      Liu, Hua-Yu; Zhao, Q.; Chen, J.F.; Jiang, J.; Socha, B.; Van Setten, E.; Engelen, A.; Meessen, J.; Crouse, M.M.; Feng, M.; Shao, W.; Cao, H.; Cao, Y.; Van Look, Lieve; Bekaert, Joost; Vandenberghe, Geert; Finders, Jo (2008)