Browsing by author "Elers, K. E."

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Enhancement of ALCVD(TM) TiN growth on Si-O-C and a-SiC:H films by O2-based plasma treatments

Satta, Alessandra; Baklanov, Mikhaïl; Richard, Olivier; Vantomme, Andre; Bender, Hugo; Conard, Thierry; Maex, Karen; Li, W.M.; Elers, K. E.; Haukka, S. (2002)