Browsing by author "Shida, Kazuki"

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Tomographic mapping analysis in the depth direction of high-Ge-content SiGe layers with compositionally graded buffers by nanobeam X-ray diffraction

Shida, Kazuki; Takeuchi, Shotaro; Imai, Yasuhiko; Kimura, Shigeru; Schulze, Andreas; Caymax, Matty; Sakai, Akira (2017)