Browsing by author "Megens, Henry"

Now showing items 1-1 of 1

Double patterning for 32-nm and below: an update

Finders, Jo; Dusa, Mircea; Vleeming, Bert; Hepp, Birgitt; Megens, Henry; Maenhoudt, Mireille; Cheng, Shaunee; Vandeweyer, Tom (2008)