Browsing by author "Byun, Y."

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    • Selective ALD Mo Deposition in 10nm Contacts 

      van der Veen, Marleen; Maes, J. W.; Varela Pedreira, Olalla; Zhu, C.; Tierno, Davide; Datta, S.; Jourdan, Nicolas; Decoster, Stefan; Wu, Chen; Mousa, M.; Byun, Y.; Struyf, Herbert; Park, Seongho; Tokei, Zsolt (2023)