Toggle navigation
My submissions
Login
Toggle navigation
View item
imec Publications Repository
imec Publications
Conference contributions
View item
imec Publications Repository
imec Publications
Conference contributions
View item
JavaScript is disabled for your browser. Some features of this site may not work without it.
Selective ALD Mo Deposition in 10nm Contacts
Metadata
Show full item record
Authors
van der Veen, Marleen
;
Maes, J. W.
;
Varela Pedreira, Olalla
;
Zhu, C.
;
Tierno, Davide
;
Datta, S.
;
Jourdan, Nicolas
;
Decoster, Stefan
;
Wu, Chen
;
Mousa, M.
;
Byun, Y.
;
Struyf, Herbert
;
Park, Seongho
;
Tokei, Zsolt
DOI
10.1109/IITC/MAM57687.2023.10154783
EISBN
979-8-3503-1097-9
ISSN
2380-632X
Conference
IEEE International Interconnect Technology Conference (IITC) / IEEE Materials for Advanced Metallization Conference (MAM)
Journal
N/A
Title
Selective ALD Mo Deposition in 10nm Contacts
Publication type
Proceedings paper
Collections
Conference contributions
Version history
Version
Item
Date
Summary
2
20.500.12860/42296.2
*
2024-05-06T14:19:47Z
validation by library/open access desk
1
20.500.12860/42296
2023-08-07T17:07:38Z
*Selected version
Search imec Publications Repository
This collection
Browse
All of imec Publications Repository
Collections
Publication date
Authors
Titles
Subjects
imec author
Availability
Publication type
This collection
Publication date
Authors
Titles
Subjects
imec author
Availability
Publication type
My account
login