Browsing by author "Zhu, C."

Now showing items 1-2 of 2

    • Buried Power Rail Metal exploration towards the 1 nm Node 

      Gupta, Anshul; Radisic, Dunja; Maes, J.W.; Varela Pedreira, Olalla; Soulie, Jean-Philippe; Jourdan, Nicolas; Mertens, Hans; Bandyopadhyay, Sudip; Le, Quoc Toan; Pacco, Antoine; Heylen, Nancy; Vandersmissen, Kevin; Devriendt, Katia; Zhu, C.; Datta, S.; Sebaai, Farid; Wang, S.; Mousa, M.; Lee, J.; Geypen, Jef; De Wachter, Bart; Chehab, Bilal; Salahuddin, Shairfe Muhammad; Murdoch, Gayle; Biesemans, Serge; Tokei, Zsolt; Dentoni Litta, Eugenio; Horiguchi, Naoto (2021)

    • Selective ALD Mo Deposition in 10nm Contacts 

      van der Veen, Marleen; Maes, J. W.; Varela Pedreira, Olalla; Zhu, C.; Tierno, Davide; Datta, S.; Jourdan, Nicolas; Decoster, Stefan; Wu, Chen; Mousa, M.; Byun, Y.; Struyf, Herbert; Park, Seongho; Tokei, Zsolt (2023)