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Selective ALD Mo Deposition in 10nm Contacts

dc.contributor.authorvan der Veen, Marleen
dc.contributor.authorMaes, J. W.
dc.contributor.authorVarela Pedreira, Olalla
dc.contributor.authorZhu, C.
dc.contributor.authorTierno, Davide
dc.contributor.authorDatta, S.
dc.contributor.authorJourdan, Nicolas
dc.contributor.authorDecoster, Stefan
dc.contributor.authorWu, Chen
dc.contributor.authorMousa, M.
dc.contributor.authorByun, Y.
dc.contributor.authorStruyf, Herbert
dc.contributor.authorPark, Seongho
dc.contributor.authorTokei, Zsolt
dc.date.accessioned2024-05-06T14:30:16Z
dc.date.available2023-08-07T17:07:38Z
dc.date.available2024-05-06T14:30:16Z
dc.date.issued2023
dc.identifier.issn2380-632X
dc.identifier.otherWOS:001027381700030
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/42296.2
dc.sourceWOS
dc.titleSelective ALD Mo Deposition in 10nm Contacts
dc.typeProceedings paper
dc.contributor.imecauthorvan der Veen, Marleen
dc.contributor.imecauthorVarela Pedreira, Olalla
dc.contributor.imecauthorTierno, Davide
dc.contributor.imecauthorJourdan, Nicolas
dc.contributor.imecauthorDecoster, Stefan
dc.contributor.imecauthorWu, Chen
dc.contributor.imecauthorStruyf, Herbert
dc.contributor.imecauthorPark, Seongho
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.orcidimecvan der Veen, Marleen::0000-0002-9402-8922
dc.contributor.orcidimecVarela Pedreira, Olalla::0000-0002-2987-1972
dc.contributor.orcidimecTierno, Davide::0000-0003-4915-904X
dc.contributor.orcidimecJourdan, Nicolas::0009-0005-4798-1736
dc.contributor.orcidimecDecoster, Stefan::0000-0003-1162-9288
dc.contributor.orcidimecWu, Chen::0000-0002-4636-8842
dc.contributor.orcidimecStruyf, Herbert::0000-0002-6782-5424
dc.contributor.orcidimecTokei, Zsolt::0000-0003-3545-3424
dc.identifier.doi10.1109/IITC/MAM57687.2023.10154783
dc.identifier.eisbn979-8-3503-1097-9
dc.source.numberofpages3
dc.source.peerreviewyes
dc.source.conferenceIEEE International Interconnect Technology Conference (IITC) / IEEE Materials for Advanced Metallization Conference (MAM)
dc.source.conferencedateMAY 22-25, 2023
dc.source.conferencelocationDresden
dc.source.journalN/A
imec.availabilityPublished - imec


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220.500.12860/42296.2*2024-05-06T14:19:47Zvalidation by library/open access desk
120.500.12860/422962023-08-07T17:07:38Z

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