Browsing by author "Park, Seongho"
Now showing items 1-13 of 13
-
Calibrated fast thermal calculation and experimental characterization of advanced BEOL stacks
Chang, Xinyue; Oprins, Herman; Lofrano, Melina; Cherman, Vladimir; Vermeersch, Bjorn; Diaz Fortuny, Javier; Park, Seongho; Tokei, Zsolt; De Wolf, Ingrid (2023) -
Enabling 3-level High Aspect Ratio Supervias for 3nm nodes and below
Montero Alvarez, Daniel; Vega Gonzalez, Victor; Feurprier, Yannick; Varela Pedreira, Olalla; Oikawa, Noriaki; Martinez Alanis, Gerardo Tadeo; Batuk, Dmitry; Puliyalil, Harinarayanan; Versluijs, Janko; De Coster, Hanne; Bazzazian, Nina; Jourdan, Nicolas; Kumar, Kaushik; Lazzarino, Frederic; Murdoch, Gayle; Park, Seongho; Tokei, Zsolt (2022-06-29) -
Exploring the use of Tungsten-based Hard Masks in BEOL interconnects for 3nm node and beyond
Montero Alvarez, Daniel; Vega Gonzalez, Victor; Puliyalil, Harinarayanan; Nie, Jiuyuan; Yang, Jialing; Schleicher, Filip; Mclaughlin, Kevin; Versluijs, Janko; Lazzarino, Frederic; Park, Seongho; Tokei, Zsolt (2022-11-10) -
Exploring W-Cu hybrid dual damascene metallization for future nodes
Lei, W.; Pethe, S.; Hwang, S.; Chen, F.; Wu, Z.; Machillot, J.; Cockburn, A.; Jansen, A.; van der Veen, Marleen; Varela Pedreira, Olalla; Heylen, Nancy; Jourdan, Nicolas; Lariviere, Stephane; Park, Seongho; Struyf, Herbert; Tokei, Zsolt (2021) -
First demonstration of Two Metal Level Semi-damascene Interconnects with Fully Self-aligned Vias at 18MP
Murdoch, Gayle; O'Toole, Martin; Marti, Giulio; Pokhrel, Ankit; Tsvetanova, Diana; Decoster, Stefan; Kundu, Souvik; Oniki, Yusuke; Thiam, Arame; Le, Quoc Toan; Varela Pedreira, Olalla; Lesniewska, Alicja; Martinez Alanis, Gerardo Tadeo; Park, Seongho; Tokei, Zsolt (2022-06-15) -
Impact of FEOL cross heating on the thermal performance of advanced BEOL
Lofrano, Melina; Vermeersch, Bjorn; Oprins, Herman; Park, Seongho; Tokei, Zsolt (2022) -
Inflection points in interconnect research and trends for 2nm and beyond in order to solve the RC bottleneck
Tokei, Zsolt; Vega Gonzalez, Victor; Murdoch, Gayle; O'Toole, Martin; Croes, Kristof; Baert, Rogier; van der Veen, Marleen; Adelmann, Christoph; Soulie, Jean-Philippe; Boemmels, Juergen; Wilson, Chris; Park, Seongho; Sankaran, Kiroubanand; Pourtois, Geoffrey; Swerts, Johan; Paolillo, Sara; Decoster, Stefan; Mao, Ming; Lazzarino, Frederic; Versluijs, Janko; Blanco, Victor; Ercken, Monique; Kesters, Els; Le, Quoc Toan; Holsteyns, Frank; Heylen, Nancy; Teugels, Lieve; Devriendt, Katia; Struyf, Herbert; Morin, Pierre; Jourdan, Nicolas; Van Elshocht, Sven; Ciofi, Ivan; Gupta, Anshul; Zahedmanesh, Houman; Vanstreels, Kris; Na, Myung Hee (2020) -
Joule heating investigation for advanced interconnect schemes with airgaps
Lofrano, Melina; Varela Pedreira, Olalla; Ciofi, Ivan; Oprins, Herman; Park, Seongho; Tokei, Zsolt (2021) -
Process Integration of High Aspect Ratio Vias with a Comparison between Co and Ru Metallizations
Vega Gonzalez, Victor; Montero Alvarez, Daniel; Versluijs, Janko; Varela Pedreira, Olalla; Jourdan, Nicolas; Puliyalil, Harinarayanan; Chehab, Bilal; Peissker, Tobias; Haider, Ali; Batuk, Dmitry; Martinez Alanis, Gerardo Tadeo; Geypen, Jef; Le, Quoc Toan; Bazzazian, Nina; Heylen, Nancy; van der Veen, Marleen; El-Mekki, Zaid; Webers, Tomas; Vats, H.; Rynders, Luc; Cupak, Miroslav; Lee, Jae Uk; Drissi, Youssef; Halipre, Luc; Gillijns, Werner; Charley, Anne-Laure; Verdonck, Patrick; Witters, Thomas; Van Gompel, Sander; Kimura, Yosuke; Ciofi, Ivan; De Wachter, Bart; Swerts, Johan; Grieten, Eva; Ercken, Monique; Kim, Ryan Ryoung han; Croes, Kristof; Leray, Philippe; Jaysankar, Manoj; Nagesh, Nishanth; Ramakers, Leon; Murdoch, Gayle; Park, Seongho; Tokei, Zsolt; Dentoni Litta, Eugenio; Horiguchi, Naoto (2021) -
Selective ALD Mo Deposition in 10nm Contacts
van der Veen, Marleen; Maes, J. W.; Varela Pedreira, Olalla; Zhu, C.; Tierno, Davide; Datta, S.; Jourdan, Nicolas; Decoster, Stefan; Wu, Chen; Mousa, M.; Byun, Y.; Struyf, Herbert; Park, Seongho; Tokei, Zsolt (2023) -
Semi-damascene Integration of a 2-layer MOL VHV Scaling Booster to Enable 4-track Standard Cells
Vega Gonzalez, Victor; Radisic, Dunja; Choudhury, Subhobroto; Tierno, Davide; Thiam, Arame; Batuk, Dmitry; Martinez Alanis, Gerardo Tadeo; Seidel, Felix; Decoster, Stefan; Kundu, Souvik; Tsvetanova, Diana; Peter, Antony; De Coster, Hanne; Sepulveda Marquez, Alfonso; Altamirano Sanchez, Efrain; Chan, BT; Drissi, Youssef; Sherazi, Yasser; Lee, Jae Uk; Ciofi, Ivan; Murdoch, Gayle; Nagesh, Nishanth; Hellings, Geert; Ryckaert, Julien; Biesemans, Serge; Dentoni Litta, Eugenio; Horiguchi, Naoto; Park, Seongho; Tokei, Zsolt (2022) -
Towards accurate temperature prediction in BEOL for reliability assessment (Invited)
Lofrano, Melina; Oprins, Herman; Chang, Xinyue; Vermeersch, Bjorn; Lesniewska, Alicja; Cherman, Vladimir; Ciofi, Ivan; Croes, Kristof; Park, Seongho; Tokei, Zsolt; Varela Pedreira, Olalla (2023) -
Two-level Semi-damascene interconnect with fully self-aligned Vias at MP18
Marti, Giulio; Pokhrel, Ankit; Murdoch, Gayle; Delie, Gilles; Gupta, Anshul; Marien, Philippe; Lesniewska, Alicja; Decoster, Stefan; Kundu, Souvik; Le, Quoc Toan; Oniki, Yusuke; Kenens, Bart; Hermans, Yannick; Park, Seongho; Tokei, Zsolt (2023)