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Exploring the use of Tungsten-based Hard Masks in BEOL interconnects for 3nm node and beyond
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Authors
Montero Alvarez, Daniel
;
Vega Gonzalez, Victor
;
Puliyalil, Harinarayanan
;
Nie, Jiuyuan
;
Yang, Jialing
;
Schleicher, Filip
;
Mclaughlin, Kevin
;
Versluijs, Janko
;
Lazzarino, Frederic
;
Park, Seongho
;
Tokei, Zsolt
Conference
AVS 68th International Symposium and Exhibition
Research discipline
Materials science
Title
Exploring the use of Tungsten-based Hard Masks in BEOL interconnects for 3nm node and beyond
Publication type
Oral presentation
Embargo date
2022-11-10
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Date
Summary
2
20.500.12860/40770.2
*
2024-04-09T08:46:32Z
validation by library/open access desk
1
20.500.12860/40770
2022-11-23T13:40:39Z
*Selected version
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