• Disruptive EUV Material Characterization in imec's AttoLab 

  Dorney, Kevin (2023-06-04)

• Twisted Extreme Nonlinear Optics: Generation of Structured Attosecond EUV Beams and Their Applications for Industrial Spectro-Microscopies 

  Dorney, Kevin (2023-07-03)

• Exploring the use of Tungsten-based Hard Masks in BEOL interconnects for 3nm node and beyond 

  Montero Alvarez, Daniel; Vega Gonzalez, Victor; Puliyalil, Harinarayanan; Nie, Jiuyuan; Yang, Jialing; Schleicher, Filip; Mclaughlin, Kevin; Versluijs, Janko; Lazzarino, Frederic; Park, Seongho; Tokei, Zsolt (2022-11-10)

• Plasma etch challenges and processing optimization in spin logic device fabrication 

  Canvel, Yann; Souriau, Laurent; Wan, Danny; Trovato, Anna; Thiam, Arame; Tsvetanova, Diana; Carpenter, Robert; Raymenants, Eline; Asselberghs, Inge; Lazzarino, Frederic; Couet, Sebastien; Kar, Gouri Sankar; Nguyen, Van Dai (2022-11-08)

• Design of High-efficiency Visible-Spectrum SiN Grating Coupler Based on Amorphous Silicon Overlay 

  Ebrahimipour, Mohammadjavad; Yurtsever, Gunay; Van Dorpe, Pol (2022-07-24)

• Gate-First High-k/Metal Gate FinFET for advanced DRAM peripheral transistors 

  Dupuy, Emmanuel; Capogreco, Elena; Dentoni Litta, Eugenio; Tao, Zheng; Sebaai, Farid; Spessot, Alessio; Horiguchi, Naoto (2022-09-20)

• Al3Sc thin films as alternative interconnect metallization 

  Soulie, Jean-Philippe; Adelmann, Christoph; Swerts, Johan; Tokei, Zsolt (2022-03-28)

• Introduction to imec's AttoLab for ultrafast kinetics of EUV exposure processes and ultra-small pitch lithography 

  Holzmeier, Fabian; Dorney, Kevin; Witting Larsen, Esben; Nuytten, Thomas; Singh, Dhirendra; van Setten, Michiel; Vanelderen, Pieter; Bargsten, Clayton; Cousin, Seth; Raymondson, Daisy; Rinard, Eric; Ward, Rod; Kapteyn, Henry; Bottcher, Stefan; Dyachenko, Oleksiy; Kremzow, Raimund; Wietstruk, Marko; Pourtois, Geoffrey; van der Heide, Paul; Petersen, John (2021-02-22)

• RBS applied to 3D nanostructures 

  Claessens, Niels; Couture, Pierre; England, Jonathan; Delabie, Annelies; Bogdanowicz, Janusz; Vantomme, Andre; Vandervorst, Wilfried; Meersschaut, Johan (2022-07-17)

• Secondary electron distribution and photosensitivity performance of resists for extreme ultraviolet (EUV) 

  Rezvani, Javid; Tchoudinov, Georghii; Nannarone, Stefano; Fallica, Roberto (2022-03-17)

• Limitation of EUV single exposure on DRAM applications: learning and challenges 

  Liu, Shih-hsiang; Dardani, Zoi; Zuurbier, Nadia; Dhagat, Parul; Wang, Erik; Fallica, Roberto (2022-06-15)

• Monolithic Integration of Thin Film Photodiode with CMOS Technology for Infrared Imaging Applications 

  Li, Yunlong; Malinowski, Pawel; Georgitzikis, Epimitheas; Pejovic, Vladimir; Lee, Jiwon; Lim, Myung jin; Mao, Ming; Moreno Hagelsieb, Luis; Lieberman, Itai; Cheyns, David; Sabuncuoglu Tezcan, Deniz (2021-03)

• Surfing on the 6G communication waves using heterogeneous integration technologies 

  Ingels, Mark (2021-11-24)

• Comparison and complementarity of Quases-Tougaard and Sessa applied to laboratory-based HAXPES spectra for the determination of the depth distribution 

  Zborowski, Charlotte; Conard, Thierry; Vanleenhove, Anja (2021)

• The HSC21: A Psychometrically Adequate Measure of Environmental Sensitivity Across Belgium and the Netherlands and Across Child and Mother Report 

  Weyn, Sofie; Van Leeuwen, Karla; Pluess, Michael; Lionetti, Francesca; Goossens, Luc; Bosmans, Guy; Van den Noortgate, Wim; Bröhl, Anne Sophie; Bijttebier, Patricia (2021)

• Confined magnetoelastic waves in thin waveguides 

  Vanderveken, Frederic; Mulkers, Jeroen; Leliaert, Jonathan; Van Waeyenberge, Bartel; Soree, Bart; Zografos, Odysseas; Ciubotaru, Florin; Adelmann, Christoph (2021)

• Hoe de lexicale leerwinst van activiteiten, taken en taaltaken verhogen? Een brug tussen wetenschappelijk onderzoek en de klaspraktijk Frans 

  VandenBerghe, Bert; De Waele, Jan (2021)

• Limited replicability and evidence for publication bias within the memory reconsolidation field (presentation) 

  Schroyens, Natalie; Sigwald, Eric L; Van den Noortgate, Wim; Beckers, Tom; Luyten, Laura (2021)

• Double torque perpendicular STT-MRAM devices for low power IoT and edge computing 

  Rao, Siddharth; Carpenter, Robert; Couet, Sebastien; Van Beek, Simon; Perumkunnil, Manu; Jossart, Nico; O'Sullivan, Barry; Kundu, Shreya; Kim, Woojin; Garello, Kevin; Souriau, Laurent; Yasin, Farrukh; Houshmand Sharifi, Shamin; Crotti, Davide; Kar, Gouri Sankar (2021)

• Atomic layers deposited nano-mechanical resonators for silicon photonics 

  Rajendran, Khannan; Petit, R.; Detavernier, C.; Van Thourhout, Dries (2021)

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