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Gate-First High-k/Metal Gate FinFET for advanced DRAM peripheral transistors
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Authors
Dupuy, Emmanuel
;
Capogreco, Elena
;
Dentoni Litta, Eugenio
;
Tao, Zheng
;
Sebaai, Farid
;
Spessot, Alessio
;
Horiguchi, Naoto
Conference
MNE - PESM 2022
Research discipline
Electrical & electronic engineering
Title
Gate-First High-k/Metal Gate FinFET for advanced DRAM peripheral transistors
Publication type
Oral presentation
Embargo date
9999-12-31
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Item
Date
Summary
2
20.500.12860/40955.2
*
2024-01-16T11:12:34Z
validation by library/open access desk
1
20.500.12860/40955
2023-01-09T09:18:41Z
*Selected version
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