dc.contributor.author | Dupuy, Emmanuel | |
dc.contributor.author | Capogreco, Elena | |
dc.contributor.author | Dentoni Litta, Eugenio | |
dc.contributor.author | Tao, Zheng | |
dc.contributor.author | Sebaai, Farid | |
dc.contributor.author | Spessot, Alessio | |
dc.contributor.author | Horiguchi, Naoto | |
dc.date.accessioned | 2024-01-16T11:13:33Z | |
dc.date.available | 2023-01-09T09:18:41Z | |
dc.date.available | 2024-01-16T11:13:33Z | |
dc.date.issued | 2022-09-20 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/40955.2 | |
dc.title | Gate-First High-k/Metal Gate FinFET for advanced DRAM peripheral transistors | |
dc.type | Oral presentation | |
dc.contributor.imecauthor | Dupuy, Emmanuel | |
dc.contributor.imecauthor | Capogreco, Elena | |
dc.contributor.imecauthor | Dentoni Litta, Eugenio | |
dc.contributor.imecauthor | Tao, Zheng | |
dc.contributor.imecauthor | Sebaai, Farid | |
dc.contributor.imecauthor | Spessot, Alessio | |
dc.contributor.imecauthor | Horiguchi, Naoto | |
dc.contributor.orcidimec | Dentoni Litta, Eugenio::0000-0003-0333-376X | |
dc.contributor.orcidimec | Dupuy, Emmanuel::0000-0003-3341-1618 | |
dc.contributor.orcidimec | Horiguchi, Naoto::0000-0001-5490-0416 | |
dc.contributor.orcidimec | Capogreco, Elena::0000-0003-3610-3629 | |
dc.contributor.orcidimec | Sebaai, Farid::0009-0008-0186-6101 | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | yes | |
dc.subject.discipline | Electrical & electronic engineering | |
dc.source.conference | MNE - PESM 2022 | |
dc.source.conferencedate | 2022-09 | |
dc.source.conferencelocation | Leuven (Belgium) | |
imec.availability | Published - imec | |