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Limitation of EUV single exposure on DRAM applications: learning and challenges
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Authors
Liu, Shih-hsiang
;
Dardani, Zoi
;
Zuurbier, Nadia
;
Dhagat, Parul
;
Wang, Erik
;
Fallica, Roberto
Conference
ASML Technology Conference 2022
Research discipline
Engineering
Title
Limitation of EUV single exposure on DRAM applications: learning and challenges
Publication type
Oral presentation
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2
20.500.12860/39726.2
*
2022-05-03T07:57:34Z
validation by library/open access desk
1
20.500.12860/39726
2022-05-02T16:50:58Z
*Selected version
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