Limitation of EUV single exposure on DRAM applications: learning and challenges
dc.contributor.author | Liu, Shih-hsiang | |
dc.contributor.author | Dardani, Zoi | |
dc.contributor.author | Zuurbier, Nadia | |
dc.contributor.author | Dhagat, Parul | |
dc.contributor.author | Wang, Erik | |
dc.contributor.author | Fallica, Roberto | |
dc.date.accessioned | 2022-05-03T07:58:04Z | |
dc.date.available | 2022-05-02T16:50:58Z | |
dc.date.available | 2022-05-03T07:58:04Z | |
dc.date.issued | 2022-06-15 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/39726.2 | |
dc.title | Limitation of EUV single exposure on DRAM applications: learning and challenges | |
dc.type | Oral presentation | |
dc.contributor.imecauthor | Fallica, Roberto | |
dc.contributor.orcidimec | Fallica, Roberto::0000-0003-4523-9624 | |
dc.source.peerreview | no | |
dc.subject.discipline | Engineering | |
dc.source.conference | ASML Technology Conference 2022 | |
dc.source.conferencedate | 2022-06-15 | |
dc.source.conferencelocation | ASML | |
imec.availability | Published - imec |
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