Browsing by author "Wang, Erik"

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Limitation of EUV single exposure on DRAM applications: learning and challenges

Liu, Shih-hsiang; Dardani, Zoi; Zuurbier, Nadia; Dhagat, Parul; Wang, Erik; Fallica, Roberto (2022-06-15)
Metal layer single EUV expose at pitch 28nm: how bright field and NTD resist advantages align

Franke, Joern-Holger; Frommhold, Andreas; Davydova, Natalia; Aubert, Remko; Nair, Vineet Vijayakrishnan; Kovalevich, Tatiana; Rio, David; Bekaert, Joost; Wang, Erik; Rispens, Gijsbert; Maslow, Mark; Hendrickx, Eric (2021)
Tomorrow's pitches on today's 0.33 NA scanner: pupil and imaging conditions to print P24 L/S and P28 contact holes

Franke, Joern-Holger; Bekaert, Joost; Wiaux, Vincent; Nair, Vineet Vijayakrishnan; Hendrickx, Eric; Davydova, Natalia; van Dijk, Andre; Wang, Erik; Maslow, Mark (2020)