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Secondary electron distribution and photosensitivity performance of resists for extreme ultraviolet (EUV)
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Authors
Rezvani, Javid
;
Tchoudinov, Georghii
;
Nannarone, Stefano
;
Fallica, Roberto
Conference
CECAM
Research discipline
Applied physics
Title
Secondary electron distribution and photosensitivity performance of resists for extreme ultraviolet (EUV)
Publication type
Oral presentation
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Date
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2
20.500.12860/39628.2
*
2022-05-06T09:21:33Z
validation by library/open access desk
1
20.500.12860/39628
2022-04-15T12:01:10Z
*Selected version
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