Exploring the use of Tungsten-based Hard Masks in BEOL interconnects for 3nm node and beyond

Montero Alvarez, Daniel; Vega Gonzalez, Victor; Puliyalil, Harinarayanan; Nie, Jiuyuan; Yang, Jialing; Schleicher, Filip; Mclaughlin, Kevin; Versluijs, Janko; Lazzarino, Frederic; Park, Seongho; Tokei, Zsolt

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Exploring the use of Tungsten-based Hard Masks in BEOL interconnects for 3nm node and beyond

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2022-11-10

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Montero Alvarez, Daniel

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Vega Gonzalez, Victor

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Puliyalil, Harinarayanan

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79 since deposited on 2022-11-23

Acq. date: 2026-04-08

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Exploring the use of Tungsten-based Hard Masks in BEOL interconnects for 3nm node and beyond

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