Publication:
Exploring the use of Tungsten-based Hard Masks in BEOL interconnects for 3nm node and beyond
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Acq. date: 2026-09-19
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Acq. date: 2026-09-20
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Downloads
79 since deposited on 2022-11-23
Acq. date: 2026-09-19
Views
1719 since deposited on 2022-11-23
59last month
10last week
Acq. date: 2026-09-20
Citations