Publication:

Exploring the use of Tungsten-based Hard Masks in BEOL interconnects for 3nm node and beyond

Date

2022-11-10
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dc.contributor.authorMontero Alvarez, Daniel
dc.contributor.authorVega Gonzalez, Victor
dc.contributor.authorPuliyalil, Harinarayanan
dc.contributor.authorNie, Jiuyuan
dc.contributor.authorYang, Jialing
dc.contributor.authorSchleicher, Filip
dc.contributor.authorMclaughlin, Kevin
dc.contributor.authorVersluijs, Janko
dc.contributor.authorLazzarino, Frederic
dc.contributor.authorPark, Seongho
dc.contributor.authorTokei, Zsolt
dc.contributor.imecauthorMontero Alvarez, Daniel
dc.contributor.imecauthorVega Gonzalez, Victor
dc.contributor.imecauthorPuliyalil, Harinarayanan
dc.contributor.imecauthorSchleicher, Filip
dc.contributor.imecauthorVersluijs, Janko
dc.contributor.imecauthorLazzarino, Frederic
dc.contributor.imecauthorPark, Seongho
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.orcidimecMontero Alvarez, Daniel::0000-0001-9966-0399
dc.contributor.orcidimecVega Gonzalez, Victor::0000-0002-4320-0585
dc.contributor.orcidimecPuliyalil, Harinarayanan::0000-0002-9749-5307
dc.contributor.orcidimecSchleicher, Filip::0000-0003-3630-7285
dc.contributor.orcidimecLazzarino, Frederic::0000-0001-7961-9727
dc.contributor.orcidimecTokei, Zsolt::0000-0003-3545-3424
dc.date.accessioned2024-04-09T08:48:08Z
dc.date.available2022-11-23T13:40:39Z
dc.date.available2024-04-09T08:48:08Z
dc.date.embargo9999-12-31
dc.date.issued2022-11-10
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/40770
dc.source.conferenceAVS 68th International Symposium and Exhibition
dc.source.conferencedate2022-11-06
dc.source.conferencelocationPittsburgh, PA
dc.subject.disciplineMaterials science
dc.subject.keywordstungsten carbide
dc.subject.keywords3nm node
dc.subject.keywordshard mask
dc.subject.keywordsline roughness
dc.subject.keywordsselectivity
dc.subject.keywordsplasma etch resistance
dc.title

Exploring the use of Tungsten-based Hard Masks in BEOL interconnects for 3nm node and beyond

dc.typeOral presentation
dspace.entity.typePublication
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