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Exploring the use of Tungsten-based Hard Masks in BEOL interconnects for 3nm node and beyond
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79 since deposited on 2022-11-23
Acq. date: 2025-12-15
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1473 since deposited on 2022-11-23
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Acq. date: 2025-12-15
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79 since deposited on 2022-11-23
Acq. date: 2025-12-15
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1473 since deposited on 2022-11-23
13last month
3last week
Acq. date: 2025-12-15
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