Publication:
Exploring the use of Tungsten-based Hard Masks in BEOL interconnects for 3nm node and beyond
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79 since deposited on 2022-11-23
Acq. date: 2026-10-12
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Acq. date: 2026-10-12
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Downloads
79 since deposited on 2022-11-23
Acq. date: 2026-10-12
Views
1750 since deposited on 2022-11-23
41last month
6last week
Acq. date: 2026-10-12
Citations